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ISO14644-1 | FED STD 209E | CLASS | Number of Par Cubic Meter by Micrometer Size | ||||||
ISO Class | English | Metric | 0.1um | 0.2um | 0.3um | 0.5um | 1um | 5um | |
1 | ISO1 | 10 | 2 | ||||||
2 | ISO2 | 100 | 24 | 10 | 4 | ||||
3 | 1 | M1.5 | 1SO3 | 1,000 | 237 | 102 | 35 | 8 | |
4 | 10 | M2.5 | ISO4 | 10,000 | 2,370 | 1,020 | 352 | 83 | |
5 | 100 | M3.5 | ISO5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
6 | 1,000 | M4.5 | ISO6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
7 | 10,000 | M5.5 | ISO7 | 352,000 | 83,200 | 2,930 | |||
8 | 100,000 | M6.5 | ISO8 | 3,520,000 | 832,000 | 29,300 | |||
9 | ISO9 | 35,200,000 | 8,320,000 | 293,000 | |||||
